Wafer-scale Demonstration of High-voltage beta-Ga2O3 MOSFETs with Excellent Uniformity and over 3kV Breakdown Voltages

Ningtao Liu, Hengrui Zhang, Shujun Zhu +7

This study demonstrates a wafer-scale growth of a 2-inch Si-doped ${\hat{I}}^2$-Ga2O3 (100) epitaxial wafer and the realization of uniform, high-voltage lateral ${\hat{I}}^2$-Ga2O3 MOSFET arrays. Th…