#dopant activation

topicdopant activation

1 paper · 1 filter

cond-mat.mtrl-sci2026

The influence of implantation conditions on dopant activation in Al-implanted 4H-SiC: A MD study applying an Al potential fitted to DFT barriers

Sabine Leroch, Robert Stella, Andreas Hössinger +1

The paper uses molecular dynamics simulations with a DFT‑fitted Al–SiC potential to study how implantation temperature and dose affect aluminum dopant activation and defect formati…