most citedShort-wavelength out-of-band EUV emission from Sn laser-produced plasma

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physics.plasm-ph2018

Controlling ion kinetic energy distributions in laser produced plasma sources by means of a picosecond pulse pair

Aneta S. Stodolna, Tiago de Faria Pinto, Faisal Ali +7

The next generation of lithography machines uses extreme ultraviolet (EUV) light originating from laser-produced plasma (LPP) sources, where a small tin droplet is ionized by an in…