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cond-mat.mtrl-sci2017
Tuning electrical properties of silicon dioxide through intrinsic nano-patterns
Subimal Majee, Devesh Barshilia, Debashree Banerjee +3
The inherent network of nanopores and voids in silicon dioxide (SiO2) is generally undesirable for aspects of film quality, electrical insulation and dielectric performance. Howeve…
cond-mat.mtrl-sci2017
Signature of growth-deposition technique on the properties of PECVD and thermal SiO2
Subimal Majee, Devesh Barshilia, Sanjeev Kumar +2
In this article, we report the process induced variation in the characteristics of PECVD deposited and thermally grown silicon dioxide (SiO2) thin film. We find key differences in…