14 citations · 14 across the 1 of their papers we have counts for
2 papers
physics.app-ph2020
High frequency mechanical excitation of a silicon nanostring with piezoelectric aluminum nitride layers
A. Pitanti, T. Makkonen, M. F. Colombano +8
A strong trend for quantum based technologies and applications follows the avenue of combining different platforms to exploit their complementary technological and functional advan…
cond-mat.mes-hall2017★ 14 cited
Through-membrane electron-beam lithography for ultrathin membrane applications
M. Neklyudova, A. K. Erdamar, L. Vicarelli +6
We present a technique to fabricate ultrathin (down to 20 nm) uniform electron transparent windows at dedicated locations in a SiN membrane for in situ transmission electron micros…