Argon Cluster-Ion Sputter Yield: Molecular Dynamics Simulations on Silicon and an Equation for Estimating Total Sputter Yield

Peter J Cumpson, Mieszko Jaskiewicz, WooKyun Kim

Argon Gas Cluster-Ion Beam sources have become widely-used on x-ray photoelectron spectroscopy (XPS) and secondary ion mass spectrometry (SIMS) instruments in recent years, but the…