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physics.atom-ph2018
Energy Level Structure of Sn Ions
J. Scheers, A. Ryabtsev, A. Borschevsky +10
Laser-produced Sn plasma sources are used to generate extreme ultraviolet (EUV) light in state-of-the-art nanolithography. An ultraviolet and optical spectrum is measured from a dr…
physics.atom-ph2017★ 37 cited
Short-wavelength out-of-band EUV emission from Sn laser-produced plasma
F. Torretti, R. Schupp, D. Kurilovich +5
We present the results of spectroscopic measurements in the extreme ultraviolet (EUV) regime (7-17 nm) of molten tin microdroplets illuminated by a high-intensity 3-J, 60-ns Nd:YAG…