106 citations · 377 across the 9 of their papers we have counts for
9 papers
Drop fragmentation by laser-pulse impact
Alexander L. Klein, Dmitry Kurilovich, Henri Lhuissier +4
We study the fragmentation of a liquid drop that is hit by a laser pulse. The drop expands into a thin sheet that breaks by the radial expulsion of ligaments from its rim and the n…
Energy Level Structure of Sn Ions
J. Scheers, A. Ryabtsev, A. Borschevsky +10
Laser-produced Sn plasma sources are used to generate extreme ultraviolet (EUV) light in state-of-the-art nanolithography. An ultraviolet and optical spectrum is measured from a dr…
Expansion Dynamics After Laser-Induced Cavitation in Liquid Tin Microdroplets
Dmitry Kurilovich, Tiago de Faria Pinto, Francesco Torretti +9
The cavitation-driven expansion dynamics of liquid tin microdroplets is investigated, set in motion by the ablative impact of a 15-ps laser pulse. We combine high-resolution strobo…
Laser-to-droplet alignment sensitivity relevant for laser-produced plasma sources of extreme ultraviolet light
Sten A. Reijers, Dmitry Kurilovich, Francesco Torretti +2
We present and experimentally validate a model describing the sensitivity of the tilt angle, expansion and propulsion velocity of a tin micro-droplet irradiated by a 1 μm Nd:YAG la…
Controlling ion kinetic energy distributions in laser produced plasma sources by means of a picosecond pulse pair
Aneta S. Stodolna, Tiago de Faria Pinto, Faisal Ali +7
The next generation of lithography machines uses extreme ultraviolet (EUV) light originating from laser-produced plasma (LPP) sources, where a small tin droplet is ionized by an in…
Sn ion energy distributions of ns- and ps-laser produced plasmas
Alex Bayerle, Mart Johan Deuzeman, Sjoerd van der Heijden +8
Ion energy distributions arising from laser-produced plasmas of Sn are measured over a wide laser parameter space. Planar-solid as well as liquid-droplet targets are exposed to inf…
Power-law scaling of plasma pressure on laser-ablated tin microdroplets
Dmitry Kurilovich, Mikhail M. Basko, Dmitrii A. Kim +7
The measurement of the propulsion of metallic microdroplets exposed to nanosecond laser pulses provides an elegant method for probing the ablation pressure in dense laser-produced…
Short-wavelength out-of-band EUV emission from Sn laser-produced plasma
F. Torretti, R. Schupp, D. Kurilovich +5
We present the results of spectroscopic measurements in the extreme ultraviolet (EUV) regime (7-17 nm) of molten tin microdroplets illuminated by a high-intensity 3-J, 60-ns Nd:YAG…
Plasma Propulsion of a Metallic Micro-droplet and its Deformation upon Laser Impact
Dmitry Kurilovich, Alexander L. Klein, Francesco Torretti +5
The propulsion of a liquid indium-tin micro-droplet by nanosecond-pulse laser impact is experimentally investigated. We capture the physics of the droplet propulsion in a scaling l…