activity
20172026
most citedElectric field non-linearity in very high frequency capacitive discharges at constant electron plasma frequency

31 citations · 170 across the 19 of their papers we have counts for

collaborators
Showing 2023Show all

1 paper · 1 filter

physics.plasm-ph2023

A systematic investigation of electric field nonlinearity and field reversal in low pressure capacitive discharges driven by sawtooth-like waveforms

Sarveshwar Sharma, Nishant Sirse, Miles M Turner +1

Understanding electron and ion heating phenomenon in capacitively coupled radio-frequency plasma discharges is vital for many plasma processing applications. In this article, using…