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physics.ins-det2018
Non-contact XUV metrology of Ru/B4C multilayer optics by means of Hartmann wavefront analysis
Mabel Ruiz-Lopez, Hugo Dacasa, Benoit Mahieu +3
Short-wavelength imaging, spectroscopy, and lithography scale down the characteristic length-scale to nano meters. This poses tight constraints on the optics finishing tolerances,…
physics.ins-det2017★ 24 cited
Micro-focusing of broadband high-order harmonic radiation by a double toroidal mirror
Hélène Coudert-Alteirac, Hugo Dacasa, Filippo Campi +16
We present an optical system based on two toroidal mirrors in a Wolter configuration to focus broadband XUV radiation. Optimization of the focusing optics alignment is carried out…