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cond-mat.mtrl-sci2019
Electrical conductivity in extremely disordered molybdenum oxynitrides thin films
J. A. Hofer, S. Bengio, G. Rozas +4
We report on the influence of the chemical composition on the electronic properties of molybdenum oxynitrides thin films grown by reactive sputtering on Si (100) substrates at room…
cond-mat.mtrl-sci2018
Synthesis of nanocrystalline d-MoN by thermal annealing of amorphous thin films grown on (100) Si by reactive DC sputtering at room temperature
N. Haberkorn, S. Bengio, H. Troiani +4
We report on the synthesis and characterization of nanocrystalline delta-MoN by crystallization of amorphous thin films grown on (100) Si by reactive sputtering at room temperature…