Atomistic modeling of thermal effects in focused electron beam induced deposition of Me${}_2$Au(tfac)

Alexey Prosvetov, Alexey V. Verkhovtsev, Gennady Sushko +1

The role of thermal effects in the focused electron beam induced deposition (FEBID) process of Me${}_2$Au(tfac) is studied by means of irradiation-driven molecular dynamics simulatio…