A. Minnich

activity

20122026

most citedDetermining eigenstates and thermal states on a quantum computer using quantum imaginary time evolution

696 citations · 3.1k across the 67 of their papers we have counts for

collaborators

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physics.app-ph2024★ 12 cited

Atomic layer etching of SiO $_{2}$ using sequential exposures of Al(CH $_{3}$ ) $_{3}$ and H $_{2}$ /SF $_{6}$ plasma

David Catherall, Azmain Hossain, Austin Minnich

On-chip photonic devices based on SiO $_{2}$ are of interest for applications such as microresonator gyroscopes and microwave sources. Although SiO $_{2}$ microdisk resonators have achie…

Atomic layer etching of SiO2​ using sequential exposures of Al(CH3​)3​ and H2​/SF6​ plasma

Atomic layer etching of SiO $_{2}$ using sequential exposures of Al(CH $_{3}$ ) $_{3}$ and H $_{2}$ /SF $_{6}$ plasma