17 citations · 68 across the 19 of their papers we have counts for
3 papers · 1 filter
Microstructural and preliminary optical and microwave characterization of erbium doped CaMoO thin films
Ignas Masiulionis, Bonnie Y. X. Lin, Sagar Kumar Seth +10
This work explores erbium-doped calcium molybdate (CaMoO) thin films grown on silicon and yttria stabilized zirconia (YSZ) substrates, as a potential solid state system for C-b…
Surrogate models to optimize plasma assisted atomic layer deposition in high aspect ratio features
Angel Yanguas-Gil, Jeffrey W. Elam
In this work we explore surrogate models to optimize plasma enhanced atomic layer deposition (PEALD) in high aspect ratio features. In plasma-based processes such as PEALD and atom…
EAIRA: Establishing a Methodology for Evaluating AI Models as Scientific Research Assistants
Franck Cappello, Sandeep Madireddy, Robert Underwood +23
Recent advancements have positioned AI, and particularly Large Language Models (LLMs), as transformative tools for scientific research, capable of addressing complex tasks that req…