85 citations · 223 across the 6 of their papers we have counts for
Showing 2015 · physics.plasm-phShow all
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physics.plasm-ph2015★ 21 cited
Structure of Velocity Distribution of Sheath-Accelerated Secondary Electrons in Asymmetric RF-DC Discharge
Alexander V. Khrabrov, Igor D. Kaganovich, Peter L. G. Ventzek +2
The ballistic population is thought to be responsible for alleviating the electron shading effect and the notching of the photoresist layer. We have performed test-particle simulat…
physics.plasm-ph2015★ 19 cited
Generation of anomalously energetic suprathermal electrons by an electron beam interacting with a nonuniform plasma
D. Sydorenko, I. D. Kaganovich, L. Chen +1
Generation of anomalously energetic suprathermal electrons was observed in simulation of a high- voltage dc discharge with electron emission from the cathode. An electron beam prod…