392 citations · 427 across the 4 of their papers we have counts for
1 paper · 2 filters
S. J. H. Petra, K. A. H. van Leeuwen, L. Feenstra +2
With a two-dimensional (2D) optical mask, nanoscale patterns are created for the first time in an atom lithography process using metastable helium atoms. The internal energy of the…