9 citations · 9 across the 1 of their papers we have counts for
1 paper · 1 filter
S. J. H. Petra, K. A. H. van Leeuwen, L. Feenstra +2
With a two-dimensional (2D) optical mask, nanoscale patterns are created for the first time in an atom lithography process using metastable helium atoms. The internal energy of the…