Structural, Optical and Electronic properties of Magnetron Sputtered Si and Ge thin films

Aniruddha Dutta, Shilpa Tripathi, Ranjeet Kumar Brajpuriya +2

We report the results of GIXRR, UV-VIS NIR and XPS measurements on Si and Ge thin films of various thicknesses. While GIXRR measurements show no presence of oxide on the top of the…