most citedTransport properties of ultrathin BaFe1.84Co0.16As2 superconducting nanowires

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physics.app-ph2020

A Study of Selectively Digital Etching Silicon-Germanium with Nitric and Hydrofluoric Acids

Chen Li, Huilong Zhu, Yongkui Zhang +13

A digital etching method was proposed to achieve excellent control of etching depth. The digital etching characteristics of p+ Si and Si0.7Ge0.3 using the combinations of HNO3 oxid…