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20172020
most citedStability of Thin Film Refractory Plasmonic Materials Taken to High Temperatures in Air

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physics.app-ph2020

Transition metal nitride thin films deposited at CMOS compatible temperatures for tunable optoelectronic and plasmonic devices

Ryan Bower, Daniel A. L. Loch, Andrey Berenov +4

Transition metal nitrides have received significant interest for use within plasmonic and optoelectronic devices. However, deposition temperature remains a significant barrier to t…