139 citations · 253 across the 5 of their papers we have counts for
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cond-mat.mtrl-sci2017★ 11 cited
Comprehensive modeling of Joule heated cantilever probes
M. Spieser, C. Rawlings, E. Lörtscher +2
The thermo-electrical properties of a complex silicon cantilever structure used in thermal scanning probe lithography are modeled based on well established empirical laws for the t…
cond-mat.mtrl-sci2014★ 53 cited
Sub 20 nm Silicon Patterning and Metal Lift-Off Using Thermal Scanning Probe Lithography
Heiko Wolf, Colin Rawlings, Philipp Mensch +4
The most direct definition of a patterning process' resolution is the smallest half-pitch feature it is capable of transferring onto the substrate. Here we demonstrate that thermal…