In-situ formation of SiGe alloy by electron beam evaporation and the effect of post deposition annealing on the energy band gap

Twisha Tah, Ch. Kishan Singh, S. Amirthapandian +5

We report the synthesis of polycrystalline (poly)-SiGe alloy thin films through solid state reaction of Si/Ge multilayer thin films on Si and glass substrates at low temperature of…