8 citations · 8 across the 2 of their papers we have counts for
2 papers
physics.app-ph2017
Selective etching of PDMS: etching as positive resist
S. Z. Szilasi, C. Cserhati
Although, poly(dimethylsiloxane) (PDMS) is a widely used material in numerous applications, such as micro- or nanofabrication, the method of its selective etching has not been know…
physics.app-ph2017★ 8 cited
Selective etching of PDMS: etching as a negative tone resist
S. Z. Szilasi, L. Juhasz
In this work authors present for the first time how to apply the additive-free, cured PDMS as a negative tone resist material, demonstrate the creation of PDMS microstructures and…