29 citations · 94 across the 10 of their papers we have counts for
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Kinetic investigation of the planar Multipole Resonance Probe under arbitrary pressure
Chunjie Wang, Michael Friedrichs, Jens Oberrath +1
Active plasma resonance spectroscopy (APRS) refers to a class of plasma diagnostic methods that use the ability of plasma to resonate at or near the electron plasma frequency for d…
Kinetic Simulation of the Ideal Multipole Resonance Probe
Junbo Gong, Michael Friedrichs, Jens Oberrath +1
Active plasma resonance spectroscopy (APRS) is a process-compatible plasma diagnostic method which utilizes the natural ability of plasmas to resonate on or near the electron plasm…
The Multipole Resonance Probe: Simultaneous Determination of Electron Density and Electron Temperature Using Spectral Kinetic Simulation
Junbo Gong, Michael Friedrichs, Jens Oberrath +1
The investigation of the spectral kinetic model of the Multipole Resonance Probe (MRP) is presented and discussed in this paper. The MRP is a radio-frequency driven probe of the pa…
Kinetic investigation of the planar Multipole Resonance Probe in the low-pressure plasma
Chunjie Wang, Michael Friedrichs, Jens Oberrath +1
Active Plasma Resonance Spectroscopy (APRS) is a well-established plasma diagnostic method: a radio frequency signal is coupled into the plasma via a probe or antenna, excites it t…