3 papers
cs.LG2025
Sequence-Aware Inline Measurement Attribution for Good-Bad Wafer Diagnosis
Kohei Miyaguchi, Masao Joko, Rebekah Sheraw +1
How can we identify problematic upstream processes when a certain type of wafer defect starts appearing at a quality checkpoint? Given the complexity of modern semiconductor manufa…
cs.LG2025
Wafer Defect Root Cause Analysis with Partial Trajectory Regression
Kohei Miyaguchi, Masao Joko, Rebekah Sheraw +1
Identifying upstream processes responsible for wafer defects is challenging due to the combinatorial nature of process flows and the inherent variability in processing routes, whic…
cs.CV2025
Semiconductor SEM Image Defect Classification Using Supervised and Semi-Supervised Learning with Vision Transformers
Chien-Fu, Huang, Katherine Sieg +4
Controlling defects in semiconductor processes is important for maintaining yield, improving production cost, and preventing time-dependent critical component failures. Electron be…