3 papers
eess.SY2025
Cross-Process Defect Attribution using Potential Loss Analysis
Tsuyoshi Idé, Kohei Miyaguchi
Cross-process root-cause analysis of wafer defects is among the most critical yet challenging tasks in semiconductor manufacturing due to the heterogeneity and combinatorial nature…
cs.LG2025
Sequence-Aware Inline Measurement Attribution for Good-Bad Wafer Diagnosis
Kohei Miyaguchi, Masao Joko, Rebekah Sheraw +1
How can we identify problematic upstream processes when a certain type of wafer defect starts appearing at a quality checkpoint? Given the complexity of modern semiconductor manufa…
cs.LG2025
Wafer Defect Root Cause Analysis with Partial Trajectory Regression
Kohei Miyaguchi, Masao Joko, Rebekah Sheraw +1
Identifying upstream processes responsible for wafer defects is challenging due to the combinatorial nature of process flows and the inherent variability in processing routes, whic…