$\mathring{A}$-Indentation for non-destructive elastic moduli measurements of supported ultra-hard ultra-thin films and nanostructures

Filippo Cellini, Yang Gao, Elisa Riedo

During conventional nanoindentation measurements, the indentation depths are usually larger than 1-10 nm, which hinders the ability to study ultra-thin films ($<$ 10 nm) and suppor…