146 citations · 270 across the 6 of their papers we have counts for
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cond-mat.mtrl-sci2017★ 41 cited
Enhanced atomic layer etching of native aluminum oxide for ultraviolet optical applications
John Hennessy, Christopher S. Moore, Kunjithapatham Balasubramanian +3
We report on the development and application of an atomic layer etching (ALE) procedure based on alternating exposures of trimethylaluminum and anhydrous hydrogen fluoride (HF) imp…
astro-ph.IM2017★ 19 cited
Charge Coupled Device detectors with high quantum efficiency at UV wavelengths
Erika T. Hamden, April D. Jewell, Charles A. Shapiro +10
We report on multilayer high efficiency antireflection coating (ARC) design and development for use at UV wavelengths on CCDs and other Si-based detectors. We have previously demon…