High-quality Blazed Gratings through Synergy between E-Beam lithography and Robust Characterisation Techniques

Analía F. Herrero, Nazanin Samadi, Andrey Sokolov +8

Maintaining the highest quality and output of photon science in the VUV-, EUV-, soft- and tender-X-ray energy ranges requires high-quality blazed profile gratings. Currently, their…