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physics.app-ph2022★ 1 cited
Heavily doped zinc oxide with plasma frequencies in the telecommunication wavelength range
Alexander Koch, Hongyan Mei, Jura Rensberg +10
We demonstrate heavy and hyper doping of ZnO by a combination of gallium (Ga) ion implantation using a focused ion beam (FIB) system and post-implantation laser annealing. Ion impl…
cond-mat.mtrl-sci2022
Tuning carrier density and phase transitions in oxide semiconductors using focused ion beams
Hongyan Mei, Alexander Koch, Chenghao Wan +10
We demonstrate spatial modification of the optical properties of thin-film metal oxides, zinc oxide and vanadium dioxide as representatives, using a commercial focused ion beam (FI…