31 citations · 54 across the 3 of their papers we have counts for
3 papers
Reactive magnetron sputtering of tungsten target in krypton/trimethylboron atmosphere
Martin Magnuson, Lina Tengdelius, Fredrik Eriksson +5
W-B-C films were deposited on Si(100) substrates held at elevated temperature by reactive sputtering from a W target in Kr/trimethylboron (TMB) plasmas. Quantitative analysis by X-…
Compositional dependence of epitaxial Tin+1SiCn MAX-phase thin films grown from a Ti3SiC2 compound target
Martin Magnusona, Lina Tengdelius, Grzegorz Greczynski +7
We investigate sputtering of a Ti3SiC2 compound target at temperatures ranging from RT (no applied external heating) to 970 oC as well as the influence of the sputtering power at 8…
Chemical Bonding in Epitaxial ZrB2 Studied by X-ray Spectroscopy
Martin Magnuson, Lina Tengdelius, Grzegorz Greczynski +2
The chemical bonding in an epitaxial ZrB2 film is investigated by Zr K-edge (1s) X-ray absorption near-edge structure (XANES) and extended X-ray absorption fine structure (EXAFS) s…