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cond-mat.mtrl-sci2024
Structural, electronic, and optical properties of 6H-SiC layers synthesized by implantation of carbon ions into silicon
D. W. Boukhvalov, D. A. Zatsepin, D. Yu. Biryukov +3
Systematic studies of the gradual fabrication by means of carbon ion-implantation of high-quality 6H-SiC layers on silicon surfaces have been carried out. The fluence of carbon ion…
cond-mat.mtrl-sci2024
Formation of yttrium oxalate phase filled by carbon clusters on the surface of yttrium oxide films
D. W. Boukhvalov, D. A. Zatsepin, D. Yu. Biryukov +3
In the current paper, we report the results of surface modification of cubic Y2O3 films employing carbon-ion implantation. The characterization results demonstrate the formation of…