collaborators

1 paper

cond-mat.mtrl-sci2025

A Novel Methodology of Visualizing Orthorhombic Phase Uniformity in Ferroelectric Hf0.5Zr0.5O2 Devices Using Piezoresponse Force Microscopy

Wei-Cheng Peng, Hsien-Yang Liu, Cheng-Yu Yu +2

Ferroelectric Hf0.5Zr0.5O2 (HZO) thin films are promising for next-generation memory and logic devices due to their CMOS compatibility and scalability. The spatial uniformity of th…