2 papers
cond-mat.mes-hall2025
Mechanistic Insight into BEOL Thermal Transport via Optical Metrology and Multiphysics Simulation
Yang Shen, Shangzhi Song, Tao Chen +4
As integrated circuits continue to scale down and adopt three-dimensional (3D) stacking, thermal management in the back-end-of-line (BEOL) has emerged as a critical design constrai…
physics.app-ph2024
Simultaneous Measurement of Thermal Conductivity and Heat Capacity Across Diverse Materials Using the Square-Pulsed Source (SPS) Technique
Tao Chen, Shangzhi Song, Yang Shen +2
State-of-the-art techniques like dual-frequency Time-Domain Thermoreflectance (TDTR) and Frequency-Domain Thermoreflectance (FDTR) offer superb capability for simultaneous measurem…