Multiphysics Simulation and First Prototype Development of a Microwave Plasma System for Chemical Vapour Deposition (CVD) Applications

Akash Akash, Sanjeev Kumar Pandey, Venkata Sai Teja Madana +9

With the aid of COMSOL multiphysics simulations, a compact microwave plasma reactor operated at 2.45 GHz frequency has been designed for diamond film deposition. The reactor consis…