Overcoming Quantum Resistivity Scaling in Nanoscale Interconnects Using Delafossite PdCoO2

Seoung-Hun Kang, Youngjun Lee, Sangmoon Yoon +4

Continued scaling into the sub 7 nm regime exacerbates quantum limited resistivity in Cu interconnects. We evaluated layered PdCoO2 and explicitly benchmarked it against Cu to iden…