4 papers
Charge accumulation by Direct Magnetoelectric Effect in ScAlN/Ni Nanoscale Devices
Federica Luciano, Emma Van Meirvenne, Ephraim Spindler +6
This work investigates the direct magnetoelectric effect in thin-film lab scale composite heterostructures comprising a 100 nm thick piezoelectric Sc0.4Al0.6N (ScAlN) and a magneto…
Epitaxial growth of BaBiO3 thin films on SrTiO3(001) and MgO(001) substrates using molecular beam epitaxy and controlling their crystal orientations competition
Islam Ahmed, Stefan De Gendt, Clement Merckling
BaBiO3 has lately gained high research attention as a parent material for an interesting family of alloyed compositions with multiple technological applications. In order to grow a…
Advancing SEM Based Nano-Scale Defect Analysis in Semiconductor Manufacturing for Advanced IC Nodes
Bappaditya Dey, Matthias Monden, Victor Blanco +2
In this research, we introduce a unified end-to-end Automated Defect Classification-Detection-Segmentation (ADCDS) framework for classifying, detecting, and segmenting multiple ins…
Photoemission Spectroscopy on photoresist materials: A protocol for analysis of radiation sensitive materials
Faegheh S. Sajjadian, Laura Galleni, Kevin M. Dorney +5
Device architectures and dimensions are now at an unimaginable level not thought possible even 10 years ago. The continued downscaling, following the so-called Moore's law, has mot…