5 papers
Microstructural and preliminary optical and microwave characterization of erbium doped CaMoO thin films
Ignas Masiulionis, Bonnie Y. X. Lin, Sagar Kumar Seth +10
This work explores erbium-doped calcium molybdate (CaMoO) thin films grown on silicon and yttria stabilized zirconia (YSZ) substrates, as a potential solid state system for C-b…
Surrogate models to optimize plasma assisted atomic layer deposition in high aspect ratio features
Angel Yanguas-Gil, Jeffrey W. Elam
In this work we explore surrogate models to optimize plasma enhanced atomic layer deposition (PEALD) in high aspect ratio features. In plasma-based processes such as PEALD and atom…
EAIRA: Establishing a Methodology for Evaluating AI Models as Scientific Research Assistants
Franck Cappello, Sandeep Madireddy, Robert Underwood +23
Recent advancements have positioned AI, and particularly Large Language Models (LLMs), as transformative tools for scientific research, capable of addressing complex tasks that req…
Benchmarking large language models for materials synthesis: the case of atomic layer deposition
Angel Yanguas-Gil, Matthew T. Dearing, Jeffrey W. Elam +5
In this work we introduce an open-ended question benchmark, ALDbench, to evaluate the performance of large language models (LLMs) in materials synthesis, and in particular in the f…
Modeling scale-up of particle coating by atomic layer deposition
Angel Yanguas-Gil, Jeffrey W. Elam
Atomic layer deposition (ALD) is a promising technique to functionalize particle surfaces for energy applications including energy storage, catalysis, and decarbonization. In this…