most citedLarge Scale Mask Optimization Via Convolutional Fourier Neural Operator and Litho-Guided Self Training

3 citations · 3 across the 1 of their papers we have counts for

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1 paper

cs.LG2022★ 3 cited

Large Scale Mask Optimization Via Convolutional Fourier Neural Operator and Litho-Guided Self Training

Haoyu Yang, Zongyi Li, Kumara Sastry +5

Machine learning techniques have been extensively studied for mask optimization problems, aiming at better mask printability, shorter turnaround time, better mask manufacturability…