Real time observation of glass-like carbon formation from SU-8 using X-ray and ultraviolet photoelectron spectroscopy

Simon Astley, Jaspa Stritt, Soumen Mandal +3

The structural development and change in elemental composition of SU-8 3005 photoresist into glass-like carbon due to pyrolysis up to 1000~$°$C is investigated utilising \tex…