3 citations · 5 across the 5 of their papers we have counts for
5 papers
Cross-Process Defect Attribution using Potential Loss Analysis
Tsuyoshi Idé, Kohei Miyaguchi
Cross-process root-cause analysis of wafer defects is among the most critical yet challenging tasks in semiconductor manufacturing due to the heterogeneity and combinatorial nature…
Sequence-Aware Inline Measurement Attribution for Good-Bad Wafer Diagnosis
Kohei Miyaguchi, Masao Joko, Rebekah Sheraw +1
How can we identify problematic upstream processes when a certain type of wafer defect starts appearing at a quality checkpoint? Given the complexity of modern semiconductor manufa…
Wafer Defect Root Cause Analysis with Partial Trajectory Regression
Kohei Miyaguchi, Masao Joko, Rebekah Sheraw +1
Identifying upstream processes responsible for wafer defects is challenging due to the combinatorial nature of process flows and the inherent variability in processing routes, whic…
Path Learning with Trajectory Advantage Regression
Kohei Miyaguchi
In this paper, we propose trajectory advantage regression, a method of offline path learning and path attribution based on reinforcement learning. The proposed method can be used t…
Socially efficient mechanism on the minimum budget
Hirota Kinoshita, Takayuki Osogami, Kohei Miyaguchi
In social decision-making among strategic agents, a universal focus lies on the balance between social and individual interests. Socially efficient mechanisms are thus desirably de…