Palladium-Coated Laterally Vibrating Resonators (LVRs) for Hydrogen Sensing

Gaia Giubilei, Farah Ben Ayed, Yvonne Sautriot +6

This work presents a novel hydrogen sensor based on 30% scandium-doped aluminum nitride (ScAlN) laterally vibrating resonators (LVRs) functionalized with a palladium (Pd) thin film…