344 citations · 2.7k across the 62 of their papers we have counts for
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Profilometry and stress analysis of suspended nanostructured thin films
Ali Akbar Darki, Alexios Parthenopoulos, Jens Vinge Nygaard +1
The profile of suspended silicon nitride thin films patterned with one-dimensional subwavelength grating structures is investigated using Atomic Force Microscopy. We first show tha…
Optical spatial differentiation with suspended subwavelength gratings
Alexios Parthenopoulos, Ali Akbar Darki, Bjarke R. Jeppesen +1
We demonstrate first- and second-order spatial differentiation of an optical beam transverse profile using thin suspended subwavelength gratings. Highly reflective one-dimensional…
Membrane sandwich squeeze film pressure sensors
Aurélien Dantan
Squeeze film pressure sensors, exploiting the dynamical modification of the mechanical properties of oscillating elements due to the compression of a fluid in a small gap region, a…