Hafnium carbide formation in oxygen deficient hafnium oxide thin films

C. Rodenbücher, E. Hildebrandt, K. Szot +6

On highly oxygen deficient thin films of hafnium oxide (hafnia, HfO${}_{2-x}$) contaminated with adsorbates of carbon oxides, the formation of hafnium carbide (HfC${}_x$) at the surfac…