31 citations · 66 across the 4 of their papers we have counts for
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cond-mat.mtrl-sci2019★ 10 cited
Reactive magnetron sputtering of tungsten target in krypton/trimethylboron atmosphere
Martin Magnuson, Lina Tengdelius, Fredrik Eriksson +5
W-B-C films were deposited on Si(100) substrates held at elevated temperature by reactive sputtering from a W target in Kr/trimethylboron (TMB) plasmas. Quantitative analysis by X-…
cond-mat.mtrl-sci2019★ 13 cited
Compositional dependence of epitaxial Tin+1SiCn MAX-phase thin films grown from a Ti3SiC2 compound target
Martin Magnusona, Lina Tengdelius, Grzegorz Greczynski +7
We investigate sputtering of a Ti3SiC2 compound target at temperatures ranging from RT (no applied external heating) to 970 oC as well as the influence of the sputtering power at 8…