Revisiting the epitaxial Si${}_3$N${}_4$ crystalline cap on AlGaN/GaN via evolutionary structure search

Xin Chen, Xin Luo, Duo Wang +2

In our recent experimental work (Appl. Phys. Lett. 125, 122109 (2024)), we observed that crystalline Si${}_3$N${}_4$ cap layers a few nanometers thick can form in situ on GaN surfaces.…