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20142026
most citedStructural and emission properties of Tb3+-doped nitrogen-rich silicon oxynitride films

22 citations · 40 across the 3 of their papers we have counts for

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cond-mat.mtrl-sci2026

RF magnetron sputtering deposition of multilayers optical filters for ultra-broadband applications with a large number of thin layers

Maxime Duris, Bryan Horcholle, Cédric Frilay +6

We present recent achievement on manufacturing optical filter and multilayers done with two complementary RF magnetron sputtering approaches: deposition duration control and in sit…