Atomistic Insights into Cu/amorphous-Ta${}_x$N Interfacial Adhesion via Machine Learning Interatomic Potentials: Effects of Stoichiometry and Interface Construction

Jeong Min Choi, Jaehoon Kim, Ji-Hwan Lee +2

Accurate understanding and control of interfacial adhesion between Cu and Ta${}_x$N diffusion barriers are essential for ensuring the mechanical reliability and integrity of Cu inter…