Impact of O concentration on the thermal stability and decomposition mechanism of (Cr,Al)N compared to (Ti,Al)N thin films

Pauline Kümmerl, Ganesh Kumar Nayak, Felix Leinenbach +6

The composition-dependent thermal stability of (Cr${}_{0.47\mp 0.03}$Al${}_{0.53\mp 0.03}$)${}_z$(O${}_y$N${}_{1-y}$)${}_{1-z}$ thin films with O concentrations of y = 0, 0.15, and 0.40…