Growth Mechanisms and Mechanical Response of 3D Superstructured Cubic and Hexagonal Hf${}_{1-x}$Al${}_x$N Thin Films

M. Lorentzon, N. Takata, D. Depla +10

Transition metal aluminum nitrides are a technologically important class of multifunctional ceramics, however, the HfAlN system remains largely unexplored. We investigate phase sta…